Advanced Design Concepts and Practice Workshop      

Beijing, China, November 19-21, 2017

ADCP2011

International Conference on Multi-Fields Modeling, Processing Simulation and Design of IC Equipment, ICMMPSD 2011
Advanced Design Concepts and Practice Workshop, ADCP 2011

Enterprise Forum on IC Equipment: Processing, Simulation, Design and Manufacturing, ICEF 2011

http://icmmpsd.info/

Tsinghua University, Beijing, 6-8 July 2011

Venue: Runze Hotel (North gate of Tsinghua University)

 

Bringing advanced technology and tools to the processing simulation and equipment design

 

Chairs

Professor Ji Linhong, Tsinghua University

Professor Michael van Tooren, TU Delft

 

Organizers:

Tsinghua University

Dalian University of Technology

Huazhong University of Science and Technology

Peking University

TU Delft

KIT

Stuttgart University

 

Sponsors:

Ministry of Science and Technology of the People´s Republic of China

Tsinghua University

 

Important date:

Paper submission: June 20, 2011

Extended abstract submission: June 25, 2011

Notification of acceptance: June 28, 2011

Registration: June 15-July 5, 2011 (Authors of accepted papers and accepted extended abstracts are supposed to submit a registration form before June 30.)

Conference: July 6-8, 2011

 

ICMMPSD 2011

Academic committee

An Yiran, Peking University

Chen Li, Tsinghua University

Chen Liping, Huazhong University of Science and Technology

Cheng Jia, Tsinghua University

Guan Zhenqun, Dalian University of Technology

Gu Ming, Tsinghua University

Hou Yuemin, Tsinghua University

Li Xiaoping, Huazhong University of Science and Technology

Pu Yikang, Tsinghua University

Song Yixu, Tsinghua University

Tian Ling, Tsinghua University

Wang Rencheng, Tsinghua University

Wang Younian, Dalian University of Technology

Xiang Dong, Tsinghua University

Yang Yiyong, China Universtiy of Geosciences

Yang Tieniu, Wuyi University

 

Secretaries

Cheng Jia, Tsinghua University

Hou Yuemin, Tsinghua University

 

Topics:

1. Theories and methods on Multi-fields modeling

2. Multidisciplinary design and optimisation of processing chambers of IC equipments

3. Advanced methods and tools of processing simulation

4. Simulation technology on IC equipments

5. Application of concurrent computing and artificial intelligence on multidisciplinary optimisation, simulation and design

6. Hardware and software on interaction design

7. Virtual design and assembling of IC equipments

8. Evaluation technology and methods

 

ADCP 2011

International academic committee

Professor Albert Albers, KIT

Professor Dieter Roller, University of Stuttgart

Dr. Gianfranco La Rocca, TU Delft

Professor Imre Horvath, TU Delft

Mr. Leif Marxen, KIT

Ms. Leila Zehbatan, University of Stuttgart

Professor Michel van Tooren, TU Delft

Mr. Sean Hanna, UCL

Dr. Stephan Rudolph, University of Stuttgart

Professor Tetsuo Tomiyama, TU Delft

Dr. Zoltan Rusak, TU Delft

Prof. Ming Xinguo, Shanghai Jiaotong University

 

Secretaries:

Zoltan Rusak, TU Delft

Hou Yuemin, Tsinghua University

 

Invited lectures:

Dr. Gianfranco La Rocca, TU Delft

Professor Imre Horvath, TU Delft

Dr. Leif Marxen, KIT

Ms. Leila Zehtaban, University of Stuttgart

Professor Michel van Tooren, TU Delft

Dr. Stephan Rudolph, University of Stuttgart

Professor Tetsuo Tomiyama, TU Delft

Dr. Zoltan Rusak, TU Delft

Prof. Ming Xinguo, Shanghai Jiaotong University

 

Topics:

1. Multidisciplinary optimization

2. Collaborative design

3. Product design theory and methods

4. Design reuse

5. Product models for life-cycle engineering

6. Interaction design and design visualization

7. Intelligent design and autonomous design

8. Advanced methods and tools for design and simulation of manufacturing equipments

 

Invited lectures:

1. On design and design evaluation in a design compiler, Dr. Stephan Rudolph, University of Stuttgart

2. On similarity in automated design synthesis and evaluation, Dr. Stephan Rudolph, University of Stuttgart

3. Design and Engineering Engines, Dr. G. La Rocca, TU Delft

4. Knowledge Based Engineering. Generative modeling for multidisciplinary design, Dr. G. La Rocca, TU Delft

5. Application of Similarity Comparison Methods in Product Design Procedures, Leila Zehtaban, University of Stuttgart

6. Physical interaction with airborne virtual models, Prof. Imre Horvath, TU Delft

7. Towards volumetric airborne visualization of evolving designs, Prof. Imre Horvath, TU Delft

8. Simulation of interaction in virtual worlds, Dr. Zoltan Rusak, TU Delft

9. Technologies for tracking body language, Dr. Zoltan Rusak, TU Delft

10. Introduction to the integrated Product engineering Model – iPeM, Leif Marxen, KIT

11. Contact&Channel-Approach (C&C-A), and advanced method for both analysis and synthesis of technical systems, Leif Marxen, KIT

12. A generic framework for design in relation to complexities, Prof. Michel van Tooren, TU Delft

13. Product life cycle simulator integrated with "Service CAD", Prof. Tomiyama, TU Delft

14. Multi-disciplinary complex systems design, Tetsuo Tomiyama

15. Knowledge Based Engineering. Generative modeling for multidisciplinary design, G. La Rocca

16. Contact&Channel-Approach (C&C-A), and advanced method for both analysis and synthesis of technical systems, Leif Marxen

17. A framework for lean product development, Prof. Ming Xinguo, Shanghai Jiaotong University

 

ICEF 2011

1. Keynote speaker: Opportunities and Challenges in Low Temperature Plasma Diagnostics, Yi-Kang Pu, Tsinghua Universtiy

Invited lectures:

2. Topics of IC Equipment Design, Fuhua Ling, Piotech Shenyang Co.Ltd.

3. Carry Out Industrial Product Design--An AMEC Case, Dee Wu, Advanced Micro-Fabrication Equipment Inc

 

Topics:

1.Design methods and tools of processing design of IC equipments

2.Processing parameter simulation of processing chambers of IC equipments

3.Test design of processing

4.Design methods and tools of design of IC equipments

5.Optimisation technology and tools of key elements of IC euipments

 

Seminar 1 July 5 15.00-17.00

Engineering complex systems with graph-based design languages? A personal view of future aspects of engineering knowledge processing based on the design compiler 43 experience”

Chair: Professor Imre Horvath, TU Delft

Lecturer: Dr. Stephan Rudolph, University of Stuttgart

 

Seminar 2 July 12 13.30-16.30

3D Shape searching Techniques”

Introduction: Dr Hou Yuemin, Tsinghua University

Lecturer: Ms. Leila Zehtaban, University of Stuttgart 

Program

TUE 5 July 2011

14.00 – 17.30

Registration

Topics

Chairs and Speakers

15.00 – 17.00

Seminar:

Engineering complex systems with graph-based design languages? A personal view of future aspects of engineering knowledge processing based on the design compiler 43 experience

Chair: Prof. Imre Horvath, TU Delft

Lecturer: Dr. Stephan Rudolph, University of Stuttgart

WED 6 July 2011

08.00 – 19.00

Registration

08.15 – 8.30

Opening lecture

Chairs

Prof. Ji Linhong

Prof. Van Tooren

Session 1: IC Equipments: processing simulation and design

Chairs

Prof. Ji Linhong,

Prof. Tian Ling

8.30 – 10.30

Introduction to the IC project

Preliminary Research on the Evolution

Mechanism of the Etching Profile in Radio-Frequency Plasma

MWorks: a design computing platform for multi-physical domain modeling and simulation

 

Process Modeling Of Dynamics-Driven Structural Design Of IC Equipments

Prof. Ji Linhong (30)

Yan, Dalian University of Technology(30)

Chen Liping, Zhou Fanli, Ding Jianwan, Science and Technology University of Huazhong(30)

Luo Xin, Liang Chengyuan, Chen Xuedong, Science and Technology University of Huazhong (30)

10.30  10.40

Break

10.40 – 12.40

A Monte Carlo Model's GPU Acceleration

 

Research on The Composite Motion Parameters of Magnetron Based on Improving Target Utilization

Design and Analysis Of A Lorentz Linear Motor For Precision Vibration-Isolation

 

 

 

Study on Uniformity of Thermal Field Analysis of PECVD Chamber and Photoresist Spraying System

High Performance Algorithm of Finite Element Mesh Generation

Modeling approach and analysis of structural parameters of inductively coupled plasma etcher based on regression orthogonal design

 

Wu Fan , Tsinghua University(20)

Hu Wei, Tsinghua University(20)

Yuan Fang, Wang Shibo, Zeng Lizhan, Jin Jianxin, huazhong Science and Technology University of Huazhong(20)

Mou Peng, Tsinghua University(20)

Guan Zhenqun, Dalian University of Technology(20)

Chengjia, Tsinghua University(20)

12.40 – 14.00

Lunch

14.00

Session 2Workshop Advanced Design Concepts and Practice

Chair

Prof Ji Linhong

 Prof Van Tooren

14.00 – 14.15

Opening lecture

Prof Van Tooren

14.15 – 14.45

14.45 – 15.15

15.15 – 15.45

Design re-use and automation

Presenters:

On design and design evaluation in a design compiler

Design and Engineering Engines

Application of Similarity Comparison Methods in Product Design Procedures

Dr. Stephan Rudolph, University of Stuttgart

Dr. G. La Rocca, TU Delft

Ms. Leila Zehtaban, University of Stuttgart

15.45 – 16.00

Break

16.00 – 16.30

16.30 – 17.00

Interaction Design

Presenters:

Issues of physical interaction with airborne virtual models

Simulation of interaction in virtual worlds

Prof. Imre Horvath, TU Delft

Dr. Zoltan Rusak, TU Delft

17.00 – 17.30

17.30 – 17.50

Integrated product engineering models

Presenters:

Introduction to the integrated product engineering Model

A dynamic model integrating processing simulation and design of chambers of IC equipments

Ms.Leif Marxen, iPeM KIT

Hou Yuemin, Ji Linhong, Tsinghua University

18.00 – 20.00

Reception

THU 7 July 2011

Session 3Workshop Advanced Design Concepts and Practice

Chair

Prof Van Tooren

8.00 – 8.30

Multi-disciplinary analysis and optimization

 A generic framework for design in relation to complexities

Prof. Michel van Tooren, TU Delft

8.30 – 9.00

On similarity in automated design synthesis and evaluation

Dr. Stephan Rudolph

9.00 – 9.30

Product life cycle simulator integrated with "Service CAD"

Prof. Tomiyama, TU Delft

9.30 – 9.45

Break

9.45 – 12.20

Session 4: Workshop Advanced Design Concepts and Practice

Chair

Dr. Stephan Rudolph,

Prof. Tetsuo Tomiyama

Methods and tools for multi-disciplinary simulation, design, and evaluation

Presenters:

Multi-disciplinary complex systems design

 

A framework for lean product development

Knowledge Based Engineering. Generative modeling for multidisciplinary design

Contact&Channel-Approach (C&C-A), and advanced method for both analysis and synthesis of technical systems

Prof. Tetsuo Tomiyama, TU Delft (30)

Prof. Ming Xinguo, Shanghai Jiaotong University (30)

Dr. G. La Rocca, TU Delft (30)

Leif Marxen, KIT (30)

12.20 – 14.00

Lunch

14.00 – 16.30

Session 5: Methods and tools for design reuse, automation and interaction

Chair

Prof Imre Horvath

Presenters:

Towards volumetric airborne visualization of evolving designs

Technologies for tracking body language

 

A Collaborative Platform for Multidisciplinary Modeling and Simulation

Shape Matching of IGES Surface Model for Design Reuse

Prof. Imre Horvath, TU Delft (30)

Zoltan Rusak, TU Delft (30)

Su Xiaoshan, Tsinghua University(20)

Hu kaimo, Tsinghua University (20)

16.30 – 18.00

Dinner

19.30 – 21.00

National Performance Center

Opening Ceremony of the 1st Beijing International Ballet and Choreography Competition

FRI 8 July 2011

08.30 – 11.30

Session 6: Enterprise Forum on IC Equipments: Processing, Simulation, Design and Manufacturing?

Seminar: Magnetic field and Plasma Simulations of PVD

Chair

Prof. Yikang Pu

Opportunities and Challenges in Low Temperature Plasma Diagnostics

 

Topics of IC Equipment Design

 

Carry Out Industrial Product Design--An AMEC Case

 

Variable structure design of processing chamber based on the flow uniformity

Introduction to Electrostatic chuck used in etch process

Simulation and Optimization of FlowField for IC Equipment Reactor Chamber

 

2D substitute model for 3D non-axisymmetric flow simulation

Yi-Kang Pu, Xi-Ming Zhu and Wen-Cong Chen, Tsinghua Universtiy (30)

Fuhua Ling, Piotech Shenyang Co.Ltd. (30)

Dee Wu, Advanced Micro-Fabrication Equipment Inc. (30)

Yang Tieniu, Wuyi University(20)

Sun Yuchun, Tsinghua University (15)

Wang Chuncai, (shower head), Tsinghua University(15)

Lin Jia, Tsinghua University(15)

12.00 – 14.00

Lunch

14.00 – 18.00

Session 7: The development framework of the platform and the expected core technology of the platform

Chair

Prof. van Tooren

Prof. Ji Linhong

14:00- 14:50 Reflection on the workshop from the project team (5 minute individual feedbacks )

14:55- 15:45 Discussion on the ‘Conceptual design and Simulation framework’ Part I

  • · Participants: Industry and academia
  • · Topic: industrial needs

15:45- 16:00 Break

16:00- 17:00 Discussion on the ‘Conceptual design and Simulation framework’ Part II

  • · Participants: Industry and academia
  • · Topic: Product / process design support tools

17:00- 17:30 Joint summary report definition

17:30- 18:00 TMCE 2012, next workshop

18.00 – 19.30

19.40 – 21.30

Dinner

Yuan Ming Yuan Royal Garden, Lighting night

TUE 12 July 2011

13.30 – 16.30

Seminar “3D Shape searching Techniques”

Introduction: Dr. Hou Yuemin

Lecturer: Ms. Leila Zehtaban, University of Stuttgart


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